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Vacature Researcher Computational Optical Scatterometry (PhD)


Functieomschrijving Researcher Computational Optical Scatterometry (PhD)

Our research department is responsible for the generation of long term value by identifying breakthroughs that fit the roadmap of semiconductor lithography and the lithography related markets. We deliver proof of concepts that can be implemented in future products after which these technologies are transferred to the Development and Engineering department of ASML. Our research department is divided into 4 domains, related to (1) mechatronics and control technologies, (2) sensors, metrology and modelling, (3) general physics and chemistry, (4) flow and material processing. ASML is building a strong position in the field of metrology for the semiconductor market. Optical scatterometry as used in the YieldStar metrology tool is an important technology. In ASML’s Research department, new concepts and applications are being invented and designed for future extensions in the field of optical scatterometry.

Job Mission
Execute high-level research in the field of optical scatterometry with application to metrology requirements for future electronic devices in the semiconductor industry.

Job Description
The research for this position comprises simulations of optical scatterometry for performance analysis for a range of current and new hardware configurations on various future devices that are relevant for the semiconductor industry. The simulations will be performed with in-house developed simulation packages which are continuously further extended. Some of the specific tasks are: • Build up geometrical 2D and 3D device structures. • Perform simulations of optical scatterometry on the device structures in various operational modes and instrument settings to assess performance capabilities. • Continuously develop more advanced physical models for continuous refinement of the optical scatterometry performance simulations. The work will be done within a Research team with guidance and help from a senior scatterometry expert.


PhD in physics with computational-physics background and with proven track record for computational modeling of complex physical systems. A background in optical scatterometry is a clear advantage.

We are look for enthousiastic researcher with the following expertise: • Experience and affinity with setting up, running and analyzing scientific simulations. • Experience with understanding, adapting, and optimizing software code. • Some understanding of physical principles of materials and structures at the nanometer scale. • Preferably a high level of understanding of optical scatterometry and light-matter interaction.

Personal skills
We are looking for a person with the following skill-set: • Team-player • Commitment to team and company • High personal ambition and drive • Drive to deliver excellent performance • Self-propelling • being able to communicate on different levels within the organization • Solution-oriented mind-set • Willingness to learn the Dutch language



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